線上常溫用純化器

描述

產品型號：線上常溫用純化器

生產廠商：NUPURE

產品簡介：

線上常溫用純化器
Room Temperature Purifier for Inert Gases and Hydrogen

特點

Removal of impurities to <1 ppb
No heaters or power required
Room-temperature operation
316L SS (<10 Ra EP) vessel
Factory regenerable for up 10 year life
Field regenerable for up to 10 year life
Improved process equipment perfomance
Optional built-in 0.003 µm filter (PF type)
High Flow – up to 2500 slpm
Lowest cost (initial and operating)

應用

Semiconductor Industry
High Purity Welding
Inert Gas Purge
Gas Cylinder Cabinets
Gas Analyzer Carts
Research and Development

功用

Reduce gaseous impurities to sub-ppb levels at room temperature.
Removes H2O, O2, CO, CO2, H2 and NMCH’s to <1ppb from any inert gas (Nitrogen, Argon, Helium, Krypton, Neon and Xenon) and H2O, O2 and CO2 from Hydrogen. (如表列)
Standard size ranges from 0 to 2500 slpm.

 

 

 

 

IMPURITIES REMOVED

Gas	Version	H2O	O2	CO2	CO	N2	H2	NMHCs	Particles
N2	PF or XL	< 1 ppb	< 1 ppb	< 1 ppb	< 1 ppb	–	< 1 ppb	< 1 ppb
									0.003 µm or 1 µm
Noble	PF or XL	< 1 ppb	< 1 ppb	< 1 ppb	< 1 ppb	N / R1	< 1 ppb	< 1 ppb	0.003 µm or 1 µm
H2	PF or XL	< 1 ppb	< 1 ppb	< 1 ppb	< 1 ppb	N / R1	–	< 1 ppb	0.003 µm or 1 µm

 

 

 

1 – N/R = Not Removed. Removal of all impurities can be accomplished using heated getter gas purifiers. See brochures for NuPure® PF Series™ and Omni™ Series Gas Purifiers.

 

 

 

Dimensional and Performance Specifications

Purifier Model	A in  (mm)	B in  (mm)	C in  (mm)	Particle Filtration Level	Max Flow
Mini CA	4.5   (114)	2.7   (69)	1.0   (25)	0.003 µm1 or 1 µm	4 slpm
100 CA	4.5   (114)	2.7   (69)	1.5   (38)	0.003 µm1 or 1 µm	12 slpm
200 CA	6.0  (152)	4.2  (107)	1.5   (38)	0.003 µm1 or 1 µm	25 slpm
500 CA	7.9  (202)	6.1  (156)	2.0   (51)	0.003 µm1 or 1 µm	50 slpm
600 CA	8.2  (208)	6.5  (167)	2.0   (51)	0.003 µm1 or 1 µm	75 slpm
1000 CA3	12.9  (328)	10.3  (262)	2.0   (51)	0.003 µm1 or 1 µm	125 slpm
1200 CA	7.9  (202)	6.1  (156)	3.0   (76)	0.003 µm1 or 1 µm	150 slpm
2000 CA	17.7 (449)	15.9   (402)	2.5   (63)	0.003 µm1 or 1 µm	250 slpm
3000 CA	17.3  (439)	15.5   (394)	3.0   (76)	0.003 µm1 or 1 µm	300 slpm
3000 CA	17.7   (449)	15.6   (396)	3.0   (76)	0.003 µm1 or 1 µm	500 slpm
5000 CA4	25.3  (643)	23.2   (590)	3.0   (76)	0.003 µm1 or 1 µm	850 slpm
10000 CA4	35.9  (913)	33.8   (860)	4.0  (101)	0.003 µm1 or 1 µm	1200 slpm
15000 CA4	35.9  (913)	33.8   (860)	5.0  (127)	0.003 µm1 or 1 µm	1800 slpm
25000 CA4	35.9  (913)	33.8   (860)	6.0  (152)	0.003 µm1 or 1 µm	2500 slpm

 

 

 

 

Maximum Pressure	250 psig (USA) / 9.9 kg/cm2G (Japan)	Materials	316L SS (< 10Ra EP)
Operating Temperature	Room Temperature	Fittings	1/4″ MVCR5 available on sizes Mini-3000
Leak Rate	< 2 x 10-9 atm cc/sec He		1/2″ MVCR5 available on sizes 600-25000