溫控純化器

描述

生產廠商：NUPURE

產品簡介：

溫控純化器
Point-of-Use Gas Purifier Systems

特點

Integral purifier, heater, insulation and electronics assembly
Compact Design
Easy-to-use
Sub ppb removal of impurities from Inert Gases, Hydrogen, Acid Gases and Oxygen.
Certified temperature comtrol unit and electronics designed for simple operation, reliability and safety
Continual heated operation or room temperature operation with convenient in-situ regeneration

應用

Analyzers (Zero/Calibration Gases)
Analytical Carts
Process Tools
Research and Development
Semiconductor Industry

功用

Reducing gaseous impurities, (see chart below) to sub-ppb levels from Inert Gases, Hydrogen and Hydrides, Acid Gases and Oxygen.
Particle filtration to 0.003rm.
Standard range of 0 – 100 slpm.

 

LISTING OF GASES PURIFIED / FILTERED
Inert Gases	Hydrogen & Hydrides	Acid Gases	Oxygen
Impurities Removed H2O, O2, CO, CO2, H21 (N2, CH4)2	Impurities Removed H2O, O2, CO2, CO (N2) 3	Impurities Removed H2O	Impurities Removed H2O, CO2
He Ar/CH4 Ne CH4 Ar CF4 Kr CCL4 Xe SF6 N2 Freons	H2 As/H3 Ar/H2 PH3 N2/H2 NH3 SiH4 B2H6 Si2H6 H2Se D.C.S. GeH4	HBr HCl HF BCl3 BF3 Cl2	O2 Air N20

1 – Only with purchase of – H model.

2 – Additional Impurities removed from He, Ne, Ar, Kr, Xe, & N2 only, using heated getter.

3 – Additional Impurities removed from Hydrogen only, using heated getter.

 

 

 

 

Omni Series Purifier Module

Model	Average Flow (slpm)1 for 1 year lifetime (removal of impurities per chart page 1)	Max Flow (slpm) @ 150 psig (Heated)
Omni 40	0.3	1.5
Omni 100	1	5
Omni 200	2	10
Omni 600	6	30
Omni 1000	10	50
Omni 2000	20	100

 

 

 

Omni Series Purifier System

Voltage	115/240 V AC
Housing	Extruded Aluminum 6063
Maximum Pressure	250 psig / 9.9 kg/cm2G (Japan)
Operating Temperature	375oC-450oC
Leak Rate	< 2×10-10 atm cc/sec He
Materials (Purifier)	316L S.S.(< 10Ra)
Fittings	1/4″ VCR2 Compression
Gas Inlet	VLSI grade (99.9995% nominal)1

 

 

 

1- Lifetime is inversely proportional to the total inlet level and to the average flow. Lifetime for H20/02 removal only using getter purifiers is approx. 4 years at the stated flows/inlet gas.

2- VCR compatible fitting standard. VCR is a registered trademark of Cajon Corporation.