溫控純化器
描述
生產廠商:NUPURE
產品簡介:
溫控純化器
Point-of-Use Gas Purifier Systems
特點
Integral purifier, heater, insulation and electronics assembly
Compact Design
Easy-to-use
Sub ppb removal of impurities from Inert Gases, Hydrogen, Acid Gases and Oxygen.
Certified temperature comtrol unit and electronics designed for simple operation, reliability and safety
Continual heated operation or room temperature operation with convenient in-situ regeneration
應用
Analyzers (Zero/Calibration Gases)
Analytical Carts
Process Tools
Research and Development
Semiconductor Industry
功用
Reducing gaseous impurities, (see chart below) to sub-ppb levels from Inert Gases, Hydrogen and Hydrides, Acid Gases and Oxygen.
Particle filtration to 0.003rm.
Standard range of 0 – 100 slpm.
Inert Gases |
Hydrogen & Hydrides |
Acid Gases |
Oxygen |
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Impurities Removed H2O, O2, CO, CO2, H21 (N2, CH4)2 |
Impurities Removed H2O, O2, CO2, CO (N2) 3 |
Impurities Removed H2O |
Impurities Removed H2O, CO2 |
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1 – Only with purchase of – H model.
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2 – Additional Impurities removed from He, Ne, Ar, Kr, Xe, & N2 only, using heated getter.
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3 – Additional Impurities removed from Hydrogen only, using heated getter.
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Omni Series Purifier Module
for 1 year lifetime (removal of impurities per chart page 1) |
@ 150 psig (Heated) |
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Omni 600
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6
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30
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Omni 1000
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10
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50
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Omni 2000
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20
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100
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Omni Series Purifier System
Voltage | 115/240 V AC |
Housing | Extruded Aluminum 6063 |
Maximum Pressure | 250 psig / 9.9 kg/cm2G (Japan) |
Operating Temperature | 375oC-450oC |
Leak Rate | < 2×10-10 atm cc/sec He |
Materials (Purifier) | 316L S.S.(< 10Ra) |
Fittings | 1/4″ VCR2 Compression |
Gas Inlet | VLSI grade (99.9995% nominal)1 |
1- Lifetime is inversely proportional to the total inlet level and to the average flow. Lifetime for H20/02 removal only using getter purifiers is approx. 4 years at the stated flows/inlet gas.
2- VCR compatible fitting standard. VCR is a registered trademark of Cajon Corporation.