氣體純化類表
描述
生產廠商：NUPURE
產品簡介：
氣體純化類表
Inerts: He Helium Ne Neon Ar Argon Kr Krypton Xe Xenon
HYDRIDES
Ar/CH4 Argon/Methane CHF3 Halocarbon
(Trifluoromethane)
AsH3 Arsine CH3F Methylfluoride
B2H6 Diborane GeH4 Germane
C2F6 Halocarbon 116 CH4 Methane
(Hexafluoroethane)
C2H6 Ethane H2S Hydrogen Sulfide
C3F8 Perfluoropropane HeSe Hydrogen Selenide
C3H8 Propane NH3 Ammonia
C4F8 Halocarbon C318 PH3 Phosphine
(Octafluorocyclobutane)
CCIF3 Freon 13 SF6 Sulfur Hexafluoride
CCl2F2 Freon 12 SiH2Cl2 Dichlorosilane (DCS)
CCl4 Carbon Tetrachloride SiH4 Silane
CF4 Freon 14 Si2H6 Disilane
CHCIF2 Freon 22
NITROGEN
Ar/N2 Argon/Nitrogen N2 Nitrogen
HYDROGEN
Ar/H2 Argon/Hydrogen H2 Hydrogen
NITROGEN/HYDROGEN
N2H2 Nitrogen/Hydrogen
CORRISIVE
BCl3 Boron Trichloride HBR Hydrogen Bromide
BF3 Boron Trifluoride HCl Hydrogen Chloride
Cl2 Chlorine HF Hydrogen Fluoride
ClF3 Chlorine Trifluoride NF3 Nitrogen Trifluoride
CO2 Carbon Dioxide SiF4 Silicon Tetra fluoride
F2 Fluorine WF6 Tungsten Hexafluoride
Note: F2, HF, and SiF4 are still under evaluation
OXYGEN
CO Carbon Monoxide N2O Nitrous Oxide
O2 Oxygen
